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Author :
Taejong Eom
1 Articles
94
Nucleation Enhancing Effect of Different ECR Plasmas Pretreatment in the RUO
2
Film Growth by MOCVD
Taejong Eom, Yunkyu Park, Chongmu Lee
J. Korean Ceram. Soc.
2005;42(2):94
DOI:
https://doi.org/10.4191/kcers.2005.42.2.094
Materials Science, Ceramics - Q1
Journal Impact Factor 2.5